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dc.contributor.advisorShaw, Steven
dc.contributor.authorBlackwell, Rebekah Mercedes
dc.date.accessioned2019-08-27T19:14:52Z
dc.date.available2019-08-27T19:14:52Z
dc.date.created2019-05
dc.date.issued2019-05
dc.date.submittedMay 2019
dc.identifier.urihttp://hdl.handle.net/11141/2878
dc.descriptionThesis (M.S.) - Florida Institute of Technology, 2019.en_US
dc.description.abstractResonant micro-electromechanical systems (MEMS) are increasingly common in applications, including inertial sensors and frequency sources. These devices operate at resonance and take advantage of their size, ability to integrate with electronics, and light damping. The performance of these devices can be improved by operation at higher vibration amplitudes, but they often begin to exhibit frequency shifts near resonance as the amplitude is increased, due to nonlinear stiffness effects. Previous works have sought to balance nonlinearities in order extend the linear dynamic range (LDR) of these resonators. The focus of this thesis is to characterize, for design purposes, another possible operating point where the system experiences local linearity. This point, at which the frequency is locally independent of the amplitude, is called the zero dispersion (ZD) point. The present analysis considers a class of micro-mechanical beam resonators using on a first-principles model that includes mechanical and electrostatic forces. The model considers the response of the fundamental mode and is nondimensionalized to minimize the number of independent parameters. As part of this analysis, a convenient new form was found for the potential used to represent the electrostatic forces. Using this potential, the amplitude-dependent frequency of vibration is computed for the entire feasible range of amplitudes. This allows for the numerical computation of the ZD point and its dependence on system parameters, in particular, the electrode gap and a DC bias voltage that can be used for device tuning. The results are shown in graphical form, which allows one to select device parameters for achieving a desired ZD amplitude.en_US
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.rightsCopyright held by author.en_US
dc.titleTuning of the Zero Dispersion Point for Micro Electrical Mechanical Systemsen_US
dc.typeThesisen_US
dc.date.updated2019-08-16T15:36:03Z
thesis.degree.nameMaster of Science in Mechanical Engineeringen_US
thesis.degree.levelMastersen_US
thesis.degree.disciplineMechanical Engineeringen_US
thesis.degree.departmentMechanical and Civil Engineeringen_US
thesis.degree.grantorFlorida Institute of Technologyen_US
dc.type.materialtext


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